280 GHz tunable waveguide bandpass filter with MEMS tuning elements

摘要

This paper presents a novel tunable waveguide bandpass filter by using microelectromechanical (MEMS) technology. The movable element driven by the U-shape electrothermal microactuator can perturb the electromagnetic distribution of the resonator and change its resonance frequency. The designed three-pole tunable rectangular waveguide bandpass filter using three tuning elements operating at 279.4 GHz achieves a tuning range about 3.6 GHz, with the insert loss less than 1 dB.