DESIGN AND ANALYSIS OF MEMS CARTWHEEL HINGE JOINT

摘要

This paper presents the design and analysis of Micro-electro-mechanical systems (MEMS) flex-ural cartwheel hinge joints. MEMS provides a significant advantage of a relatively small footprint and flexural hinge joints have the improved performance in positioning compared to traditional joints. In this paper, we present a MEMS cartwheel hinge joint desgin. Finite Element (FE) model is built to obtain the compliance matrix. Based on the FE model, we conduct the structure-based performance analysis of the hinge joint. Furthermore, two novel cartwheel joints are proposed with the improved performance.