PROPOSAL OF A NOVEL PRESSURE CONTROL METHOD FOR AIR CYLINDERS USED IN HYBRID ELECTRIC-PNEUMATIC ULTRA-PRECISION VERTICAL POSITIONING DEVICE

摘要

In this paper, a novel pressure control method utilizing both the feedback and feedforward methods was proposed. Then, the proposed method was applied to the pressure control of balancing air cylinders used in a hybrid electric-pneumatic ultra-precision vertical positioning device (a component of an aspherical lens generator). Based on the experimental results, the superiority of the proposed control method is demonstrated.