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Two-axis MEMS scanner in a resonance operation for diagnosis of middle ear diseases

机译:两个轴MEMS扫描仪在共振操作中进行中耳疾病的诊断

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摘要

A two-axis electrostatic MEMS scanner was fabricated to realize an OCT probe for middle ear diagnosis. Scanning angles were up to 8 degrees at resonance and the temperature dependence was within 1.2%.
机译:制造双轴静电MEMS扫描仪以实现中耳诊断的OCT探针。共振扫描角度高达8度,温度依赖性在1.2%范围内。

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