MEMS based LC tank with extended tuning range for Multi-band applications

摘要

This paper presents the modeling and simulations of compact multi-band MEMS based LC tank resonator suitable for very low phase-noise VCO. The resonator is based on a high-Q spiral inductor and high capacitive ratio varicap fully integrated in FBK-irst MEMS manufacturing process. Simulation results show that the resonator allows for an overall tuning range of 60% in the frequency range 2.15GHz-3.85GHz. Two separate regions of continuous tuning range (9.5% and 30%) allow to cover the whole frequency spectrum of WiMAX and IEEE802.11a/b/g. Theoretical quality factor (Q) is about 60 calculated as -3dB approach.