Absolute distance measurement using frequency-comb-referenced four-wavelength interferometry

摘要

We measure absolute distances by performing multi-wavelength interferometry (MWI) using four different wavelengths generated simultaneously from the frequency comb of a femtosecond laser. The measurement precision is estimated to be less than 63 nm in peak-to-valley over a distance of 1 m as compared to an incremental HeNe laser interferometer. We also evaluate the operational stability and robustness of the interferometer hardware system over a time period of 12 hours. Finally, it is concluded that the proposed frequency-comb-referenced multi-wavelength interferometry is capable of providing fast, precise and high stable absolute distance measurements, being well suited for industrial precision-engineering applications and near-future space missions.