Observations in ZnO thin films based pressure sensors

摘要

Recently real time monitoring systems of pressure variations has received noticeable interest. This work highlights some important issues and summaries several observations in published Zinc Oxide (ZnO) thin films based pressure sensor (TFPS) structures. New models for IV curve, pressure-output voltage variations have been developed based on empirical observations. In addition, the relations between the capacitance, sensitivity and resistance versus pressure variations have been modeled with noticeable agreements between evaluated and experimental results.