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DEVELOPMENT OF LARGE AREA NANOSTRUCTURED ANTIREFLECTION COATINGS FOR EO/IR SENSOR APPLICATIONS

机译:用于EO / IR传感器的大面积纳米结构抗反射涂层的开发

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Electro-optical/infrared sensors are being developed for a variety of defense and commercial systems applications. One of the critical technologies that will enhance EO/IR. sensor performance is the development of advanced antireflection coatings with both broadband and omnidirectional characteristics. In this paper, we review our latest work on high quality nanostructure-based antireflection structures, including recent efforts to deposit nanostructured antireflection coatings on large area substrates. Nanostructured antireflection coatings fabricated via oblique angle deposition are shown to enhance the optical transmission through transparent windows by minimizing broadband reflection losses to less than one percent, a substantial improvement over conventional thin-film antireflection coating technologies. Step-graded antireflection structures also exhibit excellent omnidirectional performance, and have recently been demonstrated on 6-inch diameter substrates.
机译:正在开发用于各种国防和商业系统应用的电光/红外传感器。增强EO / IR的关键技术之一。传感器性能是具有宽带和全向特性的高级抗反射涂层的发展。在本文中,我们回顾了有关基于高质量纳米结构的减反射结构的最新工作,包括最近在大面积基材上沉积纳米结构的减反射涂层的工作。通过倾斜角沉积制造的纳米结构减反射涂层显示出通过将宽带反射损耗降至最小百分之一以下来增强通过透明窗口的光传输,这是对传统薄膜减反射涂层技术的重大改进。逐步渐变的抗反射结构也表现出优异的全向性能,并且最近在直径为6英寸的基板上得到了证明。

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