Design and research of miniaturization two-dimensional micro-positioning platform based on parallel sheet plate flexible decoupling beams

摘要

High precision positioning stage has played increasingly important role in the areas of aeronautics and astronautics, ultra-precision manufacturing and measuring, microelectronics, biological engineering, optical engineering, etc. In this paper, a piezo-powered 2D micro-positioning stage based on parallel sheet plate flexible beams is designed. A lever amplifier structure connected by circular arc flexible hinges is designed, which can effectively enlarge driven displacement and narrow the size of the positioning stage. The structure of parallel flexible decoupling beams and circular arc flexure hinges are simulated by ANSYS. The simulation results show that the structure of the stage can effectively reduce the coupling of the micro positioning stage. Finally, the stage is manufactured and the experiments proved that the positioning accuracy is 10nm and the coupling of the micro positioning platform is 5.036%.