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Dual-gated field-effect transistors made from wafer-scale synthetic few-layer molybdenum disulfide

机译:由晶圆级合成的几层二硫化钼制成的双栅极场效应晶体管

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Molybdenum disulfide (MoS2) has recently received significant attention because of its interesting thickness-dependent properties and its potential as a semiconducting substitute to graphene [1,2]. Most of the studies so far have focused on small (< 100 microns) exfoliated MoS2 flakes [1-3]. For manufacturable electronics, it is essential to have large-area material that is compatible with standard fabrication processes for high yield and reproducibility. Though significant progress has been achieved using chemical vapor deposition (CVD) [4,5], the formation of high-quality wafer-scale MoS2 of controlled thickness is still a challenge.
机译:二硫化钼(MoS2)由于其有趣的厚度依赖性特性以及作为石墨烯的半导体替代物的潜力,因此最近受到了极大的关注[1,2]。迄今为止,大多数研究都集中在小的(<100微米)脱落的MoS2薄片上[1-3]。对于可制造的电子产品,必须具有与标准制造工艺兼容的大面积材料,以实现高产量和可重复性。尽管使用化学气相沉积(CVD)取得了重大进展[4,5],但形成厚度可控的高质量晶圆级MoS2仍然是一个挑战。

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