Effect of MTF of digital image acquisition device on phase-measuring profilometry

摘要

As affected by the MTF of digital image acquisition device, the algorithm of phase-measuring profilometry (PMP) cannot be regarded as `point to point' operation. The phase of a point is not only dependent on its N intensity values obtained by digital phase-shifting technique, but also related to its adjacent points. So systematic errors are introduced by MTF. The theoretical analysis is presented, results for simulation and experiment are given.