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NOVEL METHODS OF FABRICATION AND METROLOGY OF SUPERCONDUCTING NANO-STRUCTURES

机译:超导纳米结构的制造和计量新方法

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As metrology extends towards the nanoscale a number of potential applications and new challenges arise. By combining photolithography with focussed ion beam and/or electron beam methods, SQUID devices with loop dimensions down to 200 nm and superconducting bridge dimensions of the order 80 nm have been produced. We describe a method for characterising the effective area and the magnetic penetration depth of such devices in the extreme limit where the superconducting penetration depth lambda is much greater than the film thickness and is comparable with the lateral dimensions of the device.
机译:由于Metrology朝纳米级延伸,因此出现了许多潜在的应用和新挑战。通过将光刻与聚焦离子束和/或电子束方法相结合,已经产生了带环尺寸的鱿鱼装置,并且已经产生了达到200nm的超导桥尺寸。我们描述了一种用于表征有效面积和磁穿透深度在极限的极限中,其中超导穿透深度λ远大于膜厚度并且与装置的横向尺寸相当。

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