The distribution analysis for elements in depth of nitride coating based on high-entropy Ti-Hf-V-Nb-Zr alloy

摘要

The element-structural analysis of the nitride coatings obtained by vacuum arc evaporation from high-entropy cathodes of Ti-Hf-V-Nb-Zr was carried out. The use of complementary methods of elemental analysis (RBS, SIMS and GDMS) allowed making a comprehensive analysis of the elemental composition of the investigated coating, namely determining the elemental composition of the surface layer, identifying the uncontrolled impurities (O, C), as well as the changes in the concentration of elements with depth.