The presented paper is focused on the developing a predictive mathematical model for describing unsteady thermodynamic processes connected with the depressurization of vacuum chambers under various conditions.The prediction of time for a system depressurization and the ensuring of the precisely defined vacuum pressure control are important tasks for the design and operation of low-vacuum systems.These specific requirements are especially important for the environmental scanning electron microscopes,where it is possible to observe samples,which contain water in their natural condition.The crucial condition is that the system pressure must not drop below the saturated water vapor pressure.If the vacuum-system pressure drops below the saturated vapor pressure,observed samples will be damaged.
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