Design of the shape of the experimental chamber for the analysis of the pressure layout in the differential pumped chamber

摘要

This article is based on a study by Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistical method. Similar results were obtained using the Ansys Fluent system. Theoretical computations as Dr. Danilatos and comparative studies are performed on theoretical shape. Simulations were made to obtain the shape of an experimental chamber with complete pumping shapes so that its shaping and pumping would ensure such a flow of gas in order to ensure the same distribution of pressure in the experimental chamber in the area under investigation as in the theoretical shape.