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INVESTIGATION OF A DELAYED FEEDBACK CONTROLLER OF MEMS RESONATORS

机译:MEMS谐振器的延迟反馈控制器的研究

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摘要

Controlling mechanical systems is an important branch of mechanical engineering. Several techniques have been used to control Microelectromechanical systems (MEMS) resonators. In this paper, we study the effect of a delayed feedback controller on stabilizing MEMS resonators. A delayed feedback velocity controller is implemented through modifying the parallel plate electrostatic force used to excite the resonator into motion. A nonlinear single degree of freedom model is used to simulate the resonator response. Long time integration is used first. Then, a finite deference technique to capture periodic motion combined with the Floquet theory is used to capture the stable and unstable periodic responses. We show that applying a suitable positive gain can stabilize the MEMS resonator near or inside the instability dynamic pull in band. We also study the stability of the resonator by tracking its basins of attraction while sweeping the controller gain and the frequency of excitations. For positive delayed gains, we notice significant enhancement in the safe area of the basins of attraction.
机译:控制机械系统是机械工程的重要分支。已经使用了几种技术来控制微机电系统(MEMS)谐振器。在本文中,我们研究了延迟反馈控制器对稳定MEMS谐振器的影响。通过修改用于激发谐振器运动的平行板静电力,可以实现延迟反馈速度控制器。非线性单自由度模型用于模拟谐振器响应。首先使用长时间集成。然后,采用有限差分技术捕获周期运动,并与Floquet理论相结合,用于捕获稳定和不稳定的周期响应。我们表明,施加适当的正增益可以使MEMS谐振器在不稳定动态拉入带附近或内部稳定。我们还通过跟踪谐振腔的吸引力,同时扫描控制器增益和激励频率来研究谐振腔的稳定性。对于积极的延迟收益,我们注意到吸引盆地的安全面积有了显着提高。

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