New Fabrication technology in single point diamond turning for IR aspheric optical parts

摘要

With the development of IR imaging technology, IR aspheric optical parts become more and more widely used in IR optical systems, the precision requirements are also becoming more and more rigorous. The precision of parts directly influences the image quality and optical efficiency of IR optical systems. However, the surface shape precision and surface inclination with high quality and high efficiency machining have been a challenge for the precision optics process. This paper focuses on the surface shape precision, surface roughness and surface inclination which affect the precision of IR aspheric parts, new fabrication technology for optimization parameters in turning process of different IR materials, surface inclination machining and accurate measurement of aspheric surface is proposed. By adopting the proposed technology, high precision aspheric parts with surface shape precision PV≤0.3μm (Φ ≤80mm), surface roughness Ra≤5nm and surface inclination≤30″ (Φ ≤30mm) can be manufactured.