Normal Contour Error Measurement On-machine and Compensation Method for Polishing Complex Surface by MRF

摘要

The Magnetorheological finishing (MRF) process, based on the dwell time method with the constant normal spacing for flexible polishing, would bring out the normal contour error in the fine polishing complex surface such as aspheric surface. The normal contour error would change the ribbon's shape and removal characteristics of consistency for MRF. Based on continuously scanning the normal spacing between the workpiece and the finder by the laser range finder, the novel method was put forward to measure the normal contour errors while polishing complex surface on the machining track. The normal contour errors was measured dynamically, by which the workpiece's clamping precision, multi-axis machining NC program and the dynamic performance of the MRF machine were achieved for the verification and security check of the MRF process. The unit for measuring the normal contour errors of complex surface on-machine was designed. Based on the measurement unit's results as feedback to adjust the parameters of the feed forward control and the multi-axis machining, the optimized servo control method was presented to compensate the normal contour errors. The experiment for polishing 180mm × 180mm aspherical workpiece of fused silica by MRF was set up to validate the method. The results show that the normal contour error was controlled in less than 10um. And the PV value of the polished surface accuracy was improved from 0.95λ, to 0.09λ, under the conditions of the same process parameters. The technology in the paper has been being applied in the PKC600-Q1 MRF machine developed by the China Academe of Engineering Physics for engineering application since 2014. It is being used in the national huge optical engineering for processing the ultra-precision optical parts.