Rapid online measurement method for radius of curvature of fine grinding optics based on tool setting system

摘要

The radius of curvature (ROC) is one of the most important parameters of sphere optic components. In optic fine grinding process, radius of curvature accuracy requires up to 0.1%. We propose a method based on high-precision CNC grinding machine, develop ROC online measurement method for fine grinding optics. This rapid method only takes few measurement points based on spiral route path, attaining enough accuracy and reduce the time cost, furthermore, can greatly reduce the repeated installation error. Analysing the uncertainty sources that affect to the ROC measurement results, calculates the combined standard uncertainty 32.8 micron. Completed comparison experiments with CMM, the standard deviation of the experiment result are about 18 micron that approaches to CMM results.