Subaperture Stitching Interferometer for Large Optics

摘要

Ultra-high precision measurement of the form is critical in deterministic machining of optical components. It is generally accomplished with an interferometer. However, a standard interferometer is incompetent for large convex aspherical surfaces or those with large relative apertures. Hence subaperture stitching interferometry was proposed to extend the vertical range of measurement and enhance the lateral resolution, based on the idea of "stitching pieces together". This paper presents a prototype design for subaperture stitching interferometer (SASI) for large optics. It applies to large flats (clear aperture<700mm), large concave spherical or aspherical surfaces (clear aperture<350mm, 1:2