Method of Laser Mode Selection Based on Silicon Micro F-P Cavity

摘要

The F-P cavity is the main structure of many optical components which relate to wavelength. From the research of micro-machine F-P cavity based on MEMS technology , we can obtain basic method and technical process of many kinds of MOEMS components for mode selection. In this article, basic structure and basic principle of silicon micro-machine F-P cavity are described. Influence of optical characteristics of the two mirrors on the F-P cavity property is analyzed, including influence of the reflectance of the two mirrors on the insertion loss and working range, the relationship between the F-P cavity length and the mode selection. A kind of method of laser mode selection based on silicon micro-machine F-P cavity is introduced. Through the movement of the elastic membrane as the upper mirror, the cavity length is adjusted, then the optical length of fixing wavelength is changed, the phase difference of different beams is varied, the reflectivity of micro-machine F-P Cavity is changed, so the method of laser mode selection is realized. The experimental process is expatiated in detail. It has advantages of minuteness volume, small insertion loss, high adjustment precision. The method of laser mode selection based on silicon micro-machine F-P cavity has laid firm foundation for the future research of laser mode selection.