Research on the Bending Charge Sensitivity Distribution of Piezoelectric Quartz

摘要

In order to enhance measurement precision of the piezoelectric micro-actuator, by means of the transformation rule of tensor the research on the Bending Charge Sensitivity Distribution of Piezoelectric Quartz is conducted. First by the theories of elasticity and electromagnetism the torsion stress and bound charge are calculated, and the charge measured by the detection electrodes is obtained, which depend on the piezoelectric coefficient d12. Then using the transformation rule of tensor the piezoelectric coefficient d12 in the new coordinate system is calculated, and according to the unrestrained multipurpose optimization method the optimization Cut is obtained. Finally a special designed experiment is performed, and the experimental results show that the bound charge produced by the optimized Cut is about twice larger than that primitive Cut. This research on the bending charge sensitivity will provide a theoretical foundation for disposing the detection electrodes of a new piezoelectric micro-actuator.