The research of microfluidic chip is a vital domain and the forefront of micro total analysis systems (μTAS). Compared with the development of microfluidic chip, the research of detecting systems for microfluidic chip is backward. The micro stereo vision system is a good solution for non-contact measurement of microfluidic chip. However, it often meets refraction of light and occlusion. In this paper, based on optical theory and digital image processing, the micro stereo imaging principle of stereo light microscope (SLM) is studied and the refraction correction and micro stereo occlusion correction algorithms are proposed to achieve microfluidic chip detection. These algorithms quantize the influence of cover plate and occlusion on the measurement accuracy, and realize nondestructive, non-contact and precise 3D measurement of a hyaloid and closed container.
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