Carbon Nanocones on (a-C:H)Si Composite Films: Electronic Properties and Thermal Stability

摘要

Recently we reported on a new effect of Scanning Probe Microscopy (SPM) -based nanostructuring, namely the electric field-assisted growth of nanocones on (a-C:H):Si composite films under ambient conditions [1, 2]. The SPM process was found to be highly reproducible, thus realizing controlled patterning of the nanocone arrays. The developed film transformations were referred to a lowered content of hydrogen, carbonization and appearance of sp{sup}3-bonded carbon clusters inside the modified region. The objectives of this work are to study two principal aspects of the observed phenomenon such as variations of electronic properties during the film nanostructuring and deviations of the nanocone shape under heat treatment. Of great interest is also the influence of ambient humidity on the nanocone growth.