This study presents the design and implementation of a single-axis MEMS vibratory gyroscope with reduced coupling error and enhanced vibration resistance. Features of this study are (1) exploiting the fully-decoupled mechanism to minimize the coupling error between the operating modes; (2) introducing the tuning fork architecture combined with specific coupler designs to enhance the vibration resistance; (3) a compact structural design with small footprint (2mm ×2mm). Measurement results show a reduced coupling error signal of near 126°/s, and the acceleration sensitivity is below 1.5°/s/g. Moreover, the angular rate sensitivity is 1.25mV/°/s and the non-linearity is 0.68% within +300°/s. Contributed to the reduction of the coupling error and external vibration interference, the FDTF gyroscope achieved a bias instability of 1°/hr and the ARW of 7.2°/hr/°Hz.
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