Development of in-situ SEM nano manipulation MEMS-based testing system with ultra-precision displacement sensors for nanomechanics of MWCNTs

摘要

We have developed the in situ scanning electron microscopy (SEM) nanomaterial manipulation & testing system including newly designed Electrostatically Actuated NAnotensile Testing devices (EANATs), in order to investigate mechanical properties and fracture mechanisms of multi-walled carbon nanotubes (MWCNTs). The novel EANAT can measure uniaxial tensile elongation of nanomaterials by the capacitive sensor integrated into the lever motion amplification system. The nanomaterial manipulation system functions to pick up single MWCNTs from a substrate and to fix it on the EANAT. We have succeeded in obtaining a clear load-displacement curve of a single MWCNT, and the Young's modulus of MWCNT was determined to be 625 to 628 GPa. Furthermore, its interlayer sliding and breaking mechanisms were examined in detail.