All-oxide microcantilevers: Perspectives for device applications

摘要

We report our results on the use of micromechanical structures, such as microcantilevers (MCs), entirely based on transition metal oxides (TMOs) for the development of sensors and devices with materials at the verge of different physical states. We will discuss details of the fabrication processes and show three applications that originate from the possibility of stretching, heating and set into oscillation free-standing crystalline films or heterostructures made with these functional materials.