Lithium Niobate MEMS Devices and Subsystems for Radio Frequency Signal Processing

摘要

This paper presents a review of the recent advances in Lithium Niobate (LiNbO_3) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.