SOI-based monolithic integration of MOSFET with thermo-optic Mach-Zehnder switch towards driver-on-chip circuit switches

摘要

We demonstrate the monolithic integration of MOSFETs with thermo-optic (TO) Mach-Zehnder switches on SOI platforms. Successful driving operation was achieved for the TO switch via MOSFETs, which is promising for realizing driver-on-chip large-scale circuit switches.