Embedded seal cavity preparation technology based on the zirconia

摘要

This article describes a manufacturing method of embedded cavity using zirconia casting-belt and multi-layer lamination technology for the high temperature ceramics, as the present high temperature ceramics are difficult to form a sealed cavity and encapsulation is complicated. Complete the preparation of high temperature ceramics sealed cavity, by using punching machines to punch out the cavity in zirconia green tapes, selecting different temperature process parameters in the high-temperature sintering process, with carbon film filled or not filled in the cavity. Using SEM (the scanning electron microscope) to analysis the sample cavity, it showed that when the carbon film is filled in the cavity to select the appropriate sintering curves, it can effectively prevent the sagging, apophysis, and warpage of the cavity. This manufacturing method is available for structural integrity, high strength and good air tightness ceramics sealed cavity, it can be used for gas sensors, flow sensors, pressure sensors and capacitance type high temperature pressure sensor.