Microstructural influence of OsRu thin films on dispenser cathodes

摘要

Osmium-Ruthenium films were subjected to 1000 hours of close-spaced diode (CSD) testing and the film microstructures were evaluated in light of the CSD test results in order to generate improved film architectures for further CSD testing. Low knee temperatures correlated with a {10–10}/{10–11} film texture of annealed films.