A LabVIEW-based control system design for femtosecond laser micro-nano fabrication processing

摘要

An automatic control system composed of autofocus, recording and read-out process is designed for femtosecond laser micro-nanofabrication processing. By simulating three-dimensional intensity point spread function curve in the autofocus process, the interface between resin and glass has been found. Furthermore, information to be processed stored in form of an array, can be obtained from eagle pattern in the preprocess fabrication process. Finally, it can be read out in terms of zoom reading to receive fluorescence imaging via fluorescence microscope system and PZT motorized stage. In addition, the fabrication process is monitored by a CCD camera in real time. It demonstrates high efficiency and quality for processing when femtosecond laser intensity is reduced to a level at the axial radius value as small as ca 0.05μm. Meanwhile it indicates that it is possible to apply the proposed system in practical application for micro-nanofabrication.