Performance Evaluation of Structural Design for Microgyroscope Based on System Vibration Modes

摘要

A- new energy-analysis method for microgyroscope toevaluate the dynamical performance is presented in the paper.The principle of performance evaluation is based on systemvibration modes of a typical 2-mass microgyroscope in the viewof the energy analysis. The natural frequency and correspondingmode shapes can be obtained by the combination of modeanalysis and finite element analysis (FEA). And then thecontribution of each mode for the whole performance is achievedby modal superposition. The energy distribution in the frequencydomain of each mode for the microgyroscope is obtained. Usingtwo types of complex tuning-fork microgyroscope, this principleis consequently verified. The proposed method can provide areference for designers to estimate quickly without experimentalInvestigations whether the structure has excellent characteristic,and can reduce production cost and development cycle ofmicrogyroscope.