Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment

摘要

This paper reports a parylene-coated nMOSFET (n-type metal-oxide-semiconductor field-effect transistor)-embedded cantilever, which is suitable for the detection of chemical or biological molecules in liquid phase based on the surface stress sensing principle. The silicon cantilevers are configured along <110> direction, and the channels of the embedded-nMOSFETs are perpendicular to the cantilevers. The fabrication process based upon POST-CMOS (complementary MOS) technology for making these devices on silicon-on-insulator (SOI) wafers is reported. The functionality of the sensor is preliminarily proven by the detection of 1-octanethiol in absolute ethanol.