Thermoelectric Properties Investigation of Single nanowires by utilizing a Thermoelectric Nanowire Characterization Platform

摘要

We demonstrate the design and fabrication of a novel micromachined Thermoelectric Nanowire Characterization Platform (TNCP) which is utilized to characterize the thermoelectric properties of various nanowires. Single nanowire is assembled onto the pre-fabricated TNCP by means of dielectrophoresis (DEP) in combination with a water droplet evaporation scheme. After assembly, a reliable ohmic contact is generated between the bismuth telluride (Bi2Te3) nanowire and the underlying electrodes by means of scanning electron microscope (SEM) focused electron beam-induced deposition (EBID). Finally, the electrical conductivity and Seebeck coefficient of Silver (Ag) and Bi2Te3 nanowires are investigated and presented in this paper.