Micro atomizers have been popular over decades for many applications such as cooling, medical care and inkjet printing that were driven by reciprocal piezoelectric effect. The paper presents a simple but user-friendly design for the production of a piezoelectric atomizer utilizing a nickel nozzle plate with micro anti-stiction cavities on surface. Two PMMA substrates are specifically designed and bonded to carry out the capping, forming a micro atomizer in the study. Micro droplets (each volume ∼ 36 pl) are able to be jetted out of the fluidic nozzles with a typical diameter of ∼ 30 µm by driving the back piezoelectric plate. The thermal images of infrared thermograph into the spraying space are captured and analyzed for this cooling process.
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