Air-suspended polymer grating coupler applied as optofluidic refractive index sensor

摘要

Air-suspended polymer grating couplers were fabricated by transferring SU-8 layers onto KMPR air cavities using a structured PDMS stamp. We report on the fabrication and characterization of a resulting optofluidic refractive index sensor that is probing an analyte transported in a micro-channel below the grating coupler.