Two Step Fabrication of Tungsten Nanotips by AC Electrochemical Etching and Laser Irradiation for Nanoprobing on Advanced Technology Nodes

摘要

Rapid technology scaling results in ever shrinking device size. As such, sharper nanotips are required for application in nanoprobing systems. In this work, we present a two-step methodology of fabricating tungsten nanotips with radius of curvature down to 20 nm by using and optimized AC electrochemical etching of tungsten in KOH followed by laser irradiation in KOH. Finally we show the application of the fabricated nanotips with different radius of curvature (ROC) for nanoprobing.