NON-CONTACT POSITION CONTROL VIA FLUID SHEAR FORCE

摘要

This paper describes the design and testing of a device that can control the position of a flat wafer or glass round without any contact. The flat object is placed between two horizontal flat air bearings with a small gap (<100 microns) from bearing to object. The top air bearing is actuated using piezo actuators about θ_x and θ_z where the y-axis is the vertical axis. Figure 1 is a photo of the device that was built and tested.