Barrier Properties of Ultra High Barrier Coating Prepared by Roll to Roll PECVD Process and Analysis of Gas Leakage Mechanism

摘要

SiOx transparent ultra high barrier coating up to 1000nm was prepared by roll-to-roll PECVD system on Planelized PEN substrate, and its barrier property was measured by Calcium test. The result demonstrated WVTR of 1.7×10~(-5)g/m~2/day. And the detailed analysis of gas leakage was made by a cross-sectional TEM observation of the point of water leakage. This observation revealed a localized crack in the SiOx coating, and this cracks was suggested to be initiated by a particle, which had a similar composition as the SiOx barrier coating.