Development of 5 μm-Pixel Pitch Active-Matrix for Transmissive LCD Picoprojector

摘要

Development of transparent active-matrix for picoprojector with 5 μm color-pixel pitch has been shown. Transfer on glass of pre-processed SOI wafer, followed by silicon grinding and post-process on glass has been achieved. This process seems to be very suitable for the fabrication of high-resolution picoprojectors with transmissive LCDs.