Nano Patterned Sapphire Substrates (NPSS) Making LEDs Brighter and Cheaper

摘要

The use of pattemed sapphire substrates is already common throughout the whole LED industry,increasing GaN layer quality and more importantly light extraction of lateral LED chips.Patteming the sapphire wafers is a challenging task,since yield of the final product is already affected by this very early process step.Pushing pattemed sapphire dimensions in sub micron and even nanometer ranges,sets the bar even higher for patteming technology.Nano imprint lithography and the more recently introduced PHABLE technology offer high patteming yields in a full-wafer,high throughput fashion at lowest cost.