Preparation of SrTiO_3 Thin Films with Self-assembled Monolayers by Liquid Phase Deposition and Its Dielectric Properties

摘要

Using (NH_4)TiF_6, Sr(NO_3)_2 and H3BO_3 as raw materials, water as the solvent, and the as-prepared precursor solution with the molar ratio of (NH_4)TiF_6: Sr(NO_3)_2 : H_3BO_3 =1:1:3, SrTiO_3 thin films were fabricated on FTO substrate by the liquid phase self-assembly technique. The effects of the concentration and pH values of the as-prepared precursor solution on the dielectric properties of SrTiO_3 thin films were studied. When the concentration of the precursor solution is 0.0125 mol/L, the pH value is 3.30, the deposition temperature is 50 °C, the deposition time is 18 h and at 600 °C annealed for 2 h, SrTiO_3 thin films with the pure phase is prepared on FTO glass substrate. The dielectric constant of SrTiO_3 thin films is the maximum, 1060 when the frequency is between 1 and 45 kHz. The dielectric loss is the minimum, 3.781. The SrTiO_3 thin films prepared by liquid phase self-assembly method has a certain dielectric property.