Linearization of an Open-loop Nano Fast Tool Servo

摘要

Fast Tool Servo assisted turning processes have become a popular way to generate freeform surfaces and microstructures. For machining submicron diffractive structures a precise positioning of the tool actuator is important. To achieve accuracy within nanometer range an efficient system design is fundamental. This paper presents the system design of two piezoelectric nano Fast Tool Servos (nFTS) with strokes of less than 500 nm to achieve a high linearity.