Micro injection moulding is currently widely used to fabricate micro fluidic chips. Good surface roughness and edge quality of micro fluidic channels in the micro injection mould are vital to the functionalities of the micro fluidic chips. In this paper a hybrid micromachining approach is developed to obtain high quality micro injection mould. A micro injection mould with channels of 500 urn wide and 200 urn high is machined by high speed end milling first. The micro channels are then processed by Nd:YAG nano-second laser to remove the burrs generated in the end milling process. The measurement results indicate that micro milling combined with laser de-burring is a cost effective machining process to obtain high quality micro fluidic mould.
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