Nanometre performance of a 6 DoF MAGLEV system based on 1Dplus encoders

机译：基于1Dplus编码器的6自由度MAGLEV系统的纳米性能

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The design of a MAGLEV stage with one long stroke and five short stroke axes is presented. It uses 1Dplus encoders as position feedback for the control. Experimental results demonstrate that the system reaches nanometre level stability during standstill and scanning movements.

机译：提出了具有一个长行程和五个短行程轴的MAGLEV平台的设计。它使用1Dplus编码器作为控制的位置反馈。实验结果表明，该系统在静止和扫描运动过程中达到了纳米级的稳定性。

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《International conference of the European Society for Precision Engineering and Nanotechnology》|2012年|p.311-314|共4页
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A. Krebs; R. Coleman; A. Bakker; R. Klaver;
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中图分类机械加工精度理论;机械加工精度理论;
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Nanometre performance of a 6 DoF MAGLEV system based on 1Dplus encoders

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