Measurement of subsurface damage (SSD) of ground optical surfaces is of major concern in the assessment of high damage threshold fused silica optics for high power laser applications. We herein detail some of the measurement principles we have tested and compared to measure SSD depth, distribution and shape on various optical surfaces from diamond ground to loose abrasive fine ground surfaces. Two types of measurements are compared and discussed: destructive methods and non destructive methods. We evidence in peculiar that trying to link roughness peak to peak to SSD depth can only be performed for a fixed set of manufacturing condictions.
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