The work deals with the fabrication, calibration and application of two novel artefacts for 3D-SEM calibration. These artefacts are intended for the z-coordinate calibration, which is a crucial issue when performing measurements on 3D reconstructions obtained by employing stereophotogrammetry technique. A five-step artefact with nominal heights ranging from 2 to 50 urn and a three-step one with heights of 2, 5 and 7 μm are described, both encompassing the presence of a common vertical axis. This design allows height measurements at different magnifications and working distances without requiring artefact relocation. The artefacts are suitable for transferring traceability to 3D-SEM techniques at the micrometer scale. The artefact steps were calibrated on a stylus instrument and measured by means of 3D-SEM technique.
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