Research on automatic recognition technology for interference fringes in measurement of thin film thickness

摘要

Interference image processing is the key technology of optical interference measurement. Using high resolution image sample system to recognize the interference fringe, which substituted the traditional method measured by technological worker, is improving the measurement accuracy of thin film thickness. This paper introduced the problems on automatic interference fringe processing in absolutely measurement based on laser interference, digital image processing technology. The image acquisition of the SiO-2 film and the pre-processing of interferogram was performed. Decimal part of the interference fringes is obtained.