A zero-level packaged RF-MEMS switch with large contact force

摘要

This paper presents a novel compact RF-MEMS switch with large contact force. The switch can generate forces above 1.3mN, with 45V applied, while keeping a reasonable footprint. The actuator is based on a single metal 280μm diameter disc, that concentrates electrostatic force on a 8×8μm contact area. Zero level packaging is included in the fabrication, by intergating a metal electroplated shell fabricated above the mechanical part of the switch. The measured contact resistance of AuNi/Au contacts is 0.3Ω with 45V applied, and the off state capacitance of the packaged switch is 48fF.